Pressure dependent tailored attributes of silicon nanoneedles grown by VHF plasma technique
Gold (Au) catalysts assisted well-aligned silicon nanoneedles (SiNNs) are synthesized using very high frequency plasma enhanced chemical vapor deposition (VHF-PECVD) method. The tailored morphology and the optical reflectance of such NNs are inspected as a function of varying reactor pressure (200-8...
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Academic Press
2016
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