VHF-PECVD grown silicon nanoneedles: role of substrate temperature
Achieving highly aligned and dense silicon (Si) nanoneedles (NNs) is ever demanding for optoelectronics. We report the substrate temperature assisted Au-catalyzed SiNNs synthesis via very high frequency plasma enhanced chemical vapor deposition (VHF-PECVD) technique. The effects of varying substrate...
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Academic Press
2016
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