Optimization of home-built plasma enhanced chemical vapour deposition (PECVD) system
Carbon nanotubes (CNTs) have been receiving much attention for a wide variety of applications due to their unique electronic and mechanical properties. The plasma enhanced chemical vapour deposition (PECVD) method to synthesis carbon nanotubes (CNTs) is considered as an efficient production method o...
| Main Authors: | , , |
|---|---|
| Format: | Article |
| Language: | English |
| Published: |
2007
|
| Subjects: | |
| Online Access: | http://eprints.utm.my/8097/1/M.A.R.Saidin2007_OptimizationOfHome-BuiltPlasma.pdf |