A comparative study of nanocrystalline SiC thin films on multimode optical fiber sensors, synthesized via DBD-NTP and 150 MHz VHF-PECVD
In this study, nanocrystalline SiC films were successfully synthesized on the surface of multimode fiber (MMF) sensors using 150 MHz very-high-frequency plasma-enhanced chemical vapor deposition (VHF-PECVD) and dielectric barrier discharge nonthermal plasma (DBD-NTP) methods. The effects of the diff...
| Main Authors: | , , , , , , , , |
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| Format: | Article |
| Published: |
Elsevier Ltd
2018
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| Subjects: |