Effect of substrate temperature on the properties of diamond-like carbon deposited by PECVD in methane atmosphere
Diamond-like carbon thin films were prepared at different substrate temperatures by using DC·PECVD at 1x10·1Torr in methane atmosphere. The DC-PECVD system was reconstructed for gelling higher substrate temperature up to 560°C. Raman spectroscopy has been used to study the effect of chemical bonding...
| Main Authors: | , , , |
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| Format: | Conference or Workshop Item |
| Language: | English |
| Published: |
2006
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| Subjects: | |
| Online Access: | http://eprints.utm.my/9303/1/SurianySarmid2006_EffectofSubemperatureontheProperties.pdf |