A systematic review of deep learning for silicon wafer defect recognition
Advancements in technology have made deep learning a hot research area, and we see its applications in various fields. Its widespread use in silicon wafer defect recognition is replacing traditional machine learning and image processing methods of defect monitoring. This article presents a review of...
| Main Authors: | , , , , , |
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| Format: | Article |
| Language: | English |
| Published: |
Institute of Electrical and Electronics Engineers Inc.
2021
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| Subjects: | |
| Online Access: | http://eprints.utm.my/95105/1/UzmaBatool2021_ASystematicReviewofDeepLearning.pdf |