Controlled defect on multilayer graphene surface by oxygen plasma

The study pertaining defect fabrication of graphene has gained interest nowadays. To date, the fabrication of the defect using reactive ion etching on the oxygen flow rate has not been adequately studied. In this work, fabrication defect on multilayer graphene using reactive ion etching at 30 sccm a...

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Bibliographic Details
Main Authors: Morsin, Marriatyi, Isaak, Suhaila, Morsin, Marlia, Yusof, Yusmeeraz
Format: Conference or Workshop Item
Language:English
Published: 2017
Subjects:
Online Access:http://eprints.utm.my/97020/1/SuhailaIsaak2017_ControlledDefectOnMultilayerGrapheneSurface.pdf