Finite element analysis of material removal rate for Si wafer using heat-assisted µEDM
Micro-electrical discharge machining (µEDM) has been proved to produce high surface quality results in Si machining. In previous studies, the researchers reported the Si machining using the µEDM with several strategies such as plating, doping and temporary coating process to be machined by the µEDM....
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| Format: | Article |
| Language: | English |
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Penerbit UTM Press
2021
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| Online Access: | http://eprints.utm.my/97816/1/MohamedSultan2021_FiniteElementAnalysisofMaterialRemoval.pdf |
| _version_ | 1796866497319010304 |
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| author | Daud, Noor Dzulaikha Nafea, Marwan Mohamed Ali, Mohamed Sultan |
| author_facet | Daud, Noor Dzulaikha Nafea, Marwan Mohamed Ali, Mohamed Sultan |
| author_sort | Daud, Noor Dzulaikha |
| collection | ePrints |
| description | Micro-electrical discharge machining (µEDM) has been proved to produce high surface quality results in Si machining. In previous studies, the researchers reported the Si machining using the µEDM with several strategies such as plating, doping and temporary coating process to be machined by the µEDM. This paper reports a numerical simulation of MRR performance results using COMSOL Multiphysics. The effects of the machining temperature in Si machining using heat-assisted µEDM on achieving the optimum MRR results is studied. The simulation results showed the highest MRR is 1.48666 × 10-5 mm3/seconds achieved at 250 °C. |
| first_indexed | 2024-03-05T21:13:02Z |
| format | Article |
| id | utm.eprints-97816 |
| institution | Universiti Teknologi Malaysia - ePrints |
| language | English |
| last_indexed | 2024-03-05T21:13:02Z |
| publishDate | 2021 |
| publisher | Penerbit UTM Press |
| record_format | dspace |
| spelling | utm.eprints-978162022-11-02T09:45:45Z http://eprints.utm.my/97816/ Finite element analysis of material removal rate for Si wafer using heat-assisted µEDM Daud, Noor Dzulaikha Nafea, Marwan Mohamed Ali, Mohamed Sultan TK Electrical engineering. Electronics Nuclear engineering Micro-electrical discharge machining (µEDM) has been proved to produce high surface quality results in Si machining. In previous studies, the researchers reported the Si machining using the µEDM with several strategies such as plating, doping and temporary coating process to be machined by the µEDM. This paper reports a numerical simulation of MRR performance results using COMSOL Multiphysics. The effects of the machining temperature in Si machining using heat-assisted µEDM on achieving the optimum MRR results is studied. The simulation results showed the highest MRR is 1.48666 × 10-5 mm3/seconds achieved at 250 °C. Penerbit UTM Press 2021-09-15 Article PeerReviewed application/pdf en http://eprints.utm.my/97816/1/MohamedSultan2021_FiniteElementAnalysisofMaterialRemoval.pdf Daud, Noor Dzulaikha and Nafea, Marwan and Mohamed Ali, Mohamed Sultan (2021) Finite element analysis of material removal rate for Si wafer using heat-assisted µEDM. ELEKTRIKA- Journal of Electrical Engineering, 20 (2-2). pp. 15-19. ISSN 0128-4428 https://elektrika.utm.my/index.php/ELEKTRIKA_Journal/article/view/301 NA |
| spellingShingle | TK Electrical engineering. Electronics Nuclear engineering Daud, Noor Dzulaikha Nafea, Marwan Mohamed Ali, Mohamed Sultan Finite element analysis of material removal rate for Si wafer using heat-assisted µEDM |
| title | Finite element analysis of material removal rate for Si wafer using heat-assisted µEDM |
| title_full | Finite element analysis of material removal rate for Si wafer using heat-assisted µEDM |
| title_fullStr | Finite element analysis of material removal rate for Si wafer using heat-assisted µEDM |
| title_full_unstemmed | Finite element analysis of material removal rate for Si wafer using heat-assisted µEDM |
| title_short | Finite element analysis of material removal rate for Si wafer using heat-assisted µEDM |
| title_sort | finite element analysis of material removal rate for si wafer using heat assisted µedm |
| topic | TK Electrical engineering. Electronics Nuclear engineering |
| url | http://eprints.utm.my/97816/1/MohamedSultan2021_FiniteElementAnalysisofMaterialRemoval.pdf |
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