Micromachining of silicon wafer to mirror finish /

Eitemau Tebyg

• Micromachining of silicon wafer to mirror finish [electronic resource] /
  gan: 401104 Law, Choon Ming, et al.
  Cyhoeddwyd: (2007)
• Improving performance in micromachining of silicon wafer using heat-assisted micro electrical discharge method/
  gan: Noor Dzulaika Daud 1987-, author 644772, et al.
  Cyhoeddwyd: (2022)
• Improving performance in micromachining of silicon wafer using heat-assisted micro electrical discharge method/
  gan: Noor Dzulaika Daud 1987-, author 644772
  Cyhoeddwyd: (2022)
• Introduction to micromachining /
  gan: Jain, V. K.
  Cyhoeddwyd: (2010)
• Wafer-scale silicon microfabrication technology toward realization of low-cost sub-THz waveguide devices
  gan: Zhao, Xinghai, et al.
  Cyhoeddwyd: (2024)