Micromachining of silicon wafer to mirror finish /

Geahča maid

• Micromachining of silicon wafer to mirror finish [electronic resource] /
  Dahkki: 401104 Law, Choon Ming, et al.
  Almmustuhtton: (2007)
• Improving performance in micromachining of silicon wafer using heat-assisted micro electrical discharge method/
  Dahkki: Noor Dzulaika Daud 1987-, author 644772, et al.
  Almmustuhtton: (2022)
• Improving performance in micromachining of silicon wafer using heat-assisted micro electrical discharge method/
  Dahkki: Noor Dzulaika Daud 1987-, author 644772
  Almmustuhtton: (2022)
• Introduction to micromachining /
  Dahkki: Jain, V. K.
  Almmustuhtton: (2010)
• Wafer-scale silicon microfabrication technology toward realization of low-cost sub-THz waveguide devices
  Dahkki: Zhao, Xinghai, et al.
  Almmustuhtton: (2024)