Optical micro- and nanometrology in microsystems technology : 5-7 April 2006, Strasbourg, France /
40
| Main Authors: | , , , |
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| Format: | |
| Language: | eng |
| Published: |
Bellingham, WA : SPIE Press,
2006
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| Subjects: |
| _version_ | 1796692116205731840 |
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| author | Gorecki, Christophe Asundi, Amand K. Osten, Wolfgang The International Society for Optical Engineering |
| author_facet | Gorecki, Christophe Asundi, Amand K. Osten, Wolfgang The International Society for Optical Engineering |
| author_sort | Gorecki, Christophe |
| collection | OCEAN |
| description | 40 |
| first_indexed | 2024-03-05T00:04:12Z |
| format | |
| id | KOHA-OAI-TEST:231566 |
| institution | Universiti Teknologi Malaysia - OCEAN |
| language | eng |
| last_indexed | 2024-03-05T00:04:12Z |
| publishDate | 2006 |
| publisher | Bellingham, WA : SPIE Press, |
| record_format | dspace |
| spelling | KOHA-OAI-TEST:2315662020-12-19T17:06:59ZOptical micro- and nanometrology in microsystems technology : 5-7 April 2006, Strasbourg, France / Gorecki, Christophe Asundi, Amand K. Osten, Wolfgang The International Society for Optical Engineering Bellingham, WA : SPIE Press,2006eng40PSZJBLOptical measurementsURN:ISBN:0819462446 (pbk.) |
| spellingShingle | Optical measurements Gorecki, Christophe Asundi, Amand K. Osten, Wolfgang The International Society for Optical Engineering Optical micro- and nanometrology in microsystems technology : 5-7 April 2006, Strasbourg, France / |
| title | Optical micro- and nanometrology in microsystems technology : 5-7 April 2006, Strasbourg, France / |
| title_full | Optical micro- and nanometrology in microsystems technology : 5-7 April 2006, Strasbourg, France / |
| title_fullStr | Optical micro- and nanometrology in microsystems technology : 5-7 April 2006, Strasbourg, France / |
| title_full_unstemmed | Optical micro- and nanometrology in microsystems technology : 5-7 April 2006, Strasbourg, France / |
| title_short | Optical micro- and nanometrology in microsystems technology : 5-7 April 2006, Strasbourg, France / |
| title_sort | optical micro and nanometrology in microsystems technology 5 7 april 2006 strasbourg france |
| topic | Optical measurements |
| work_keys_str_mv | AT goreckichristophe opticalmicroandnanometrologyinmicrosystemstechnology57april2006strasbourgfrance AT asundiamandk opticalmicroandnanometrologyinmicrosystemstechnology57april2006strasbourgfrance AT ostenwolfgang opticalmicroandnanometrologyinmicrosystemstechnology57april2006strasbourgfrance AT theinternationalsocietyforopticalengineering opticalmicroandnanometrologyinmicrosystemstechnology57april2006strasbourgfrance |