| _version_ | 1826417076911210496 |
|---|---|
| author | 392095 Corl, Edwin A. Wimpfheimer, Hans |
| author_facet | 392095 Corl, Edwin A. Wimpfheimer, Hans |
| author_sort | 392095 Corl, Edwin A. |
| collection | OCEAN |
| description | PSZJBL |
| first_indexed | 2024-03-05T03:40:15Z |
| format | |
| id | KOHA-OAI-TEST:303602 |
| institution | Universiti Teknologi Malaysia - OCEAN |
| language | eng |
| last_indexed | 2024-03-05T03:40:15Z |
| record_format | dspace |
| spelling | KOHA-OAI-TEST:3036022020-12-19T17:10:06ZThickness measurement of silicon dioxide layers by ultraviolet-visible interference method / 392095 Corl, Edwin A. Wimpfheimer, Hans engPSZJBLSiliconChemicals |
| spellingShingle | Silicon Chemicals 392095 Corl, Edwin A. Wimpfheimer, Hans Thickness measurement of silicon dioxide layers by ultraviolet-visible interference method / |
| title | Thickness measurement of silicon dioxide layers by ultraviolet-visible interference method / |
| title_full | Thickness measurement of silicon dioxide layers by ultraviolet-visible interference method / |
| title_fullStr | Thickness measurement of silicon dioxide layers by ultraviolet-visible interference method / |
| title_full_unstemmed | Thickness measurement of silicon dioxide layers by ultraviolet-visible interference method / |
| title_short | Thickness measurement of silicon dioxide layers by ultraviolet-visible interference method / |
| title_sort | thickness measurement of silicon dioxide layers by ultraviolet visible interference method |
| topic | Silicon Chemicals |
| work_keys_str_mv | AT 392095corledwina thicknessmeasurementofsilicondioxidelayersbyultravioletvisibleinterferencemethod AT wimpfheimerhans thicknessmeasurementofsilicondioxidelayersbyultravioletvisibleinterferencemethod |