Unified analytic formula for physical sputtering yield at normal ion incidence /
PSZJBL
Main Authors: | , , |
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Format: | |
Sprog: | eng |
Udgivet: |
Toki, Japan : NIFS,
2001
|
Fag: |
Summary: | PSZJBL |
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PSZJBL
Main Authors: | , , |
---|---|
Format: | |
Sprog: | eng |
Udgivet: |
Toki, Japan : NIFS,
2001
|
Fag: |
Summary: | PSZJBL |
---|