2.5D Flexible Wind Sensor Using Differential Plate Capacitors

In this paper, a novel 2.5-dimensional (2.5D) flexible wind sensor is proposed based on four differential plate capacitors. This design consists of a windward pillar, two electrode layers, and a support layer, which are all made of polydimethylsiloxane (PDMS) with different Young’s moduli. A 2 mm ×...

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Bibliographic Details
Main Authors: Yu Wan, Zhenxiang Yi
Format: Article
Language:English
Published: MDPI AG 2021-04-01
Series:Sensors
Subjects:
Online Access:https://www.mdpi.com/1424-8220/21/9/3101
Description
Summary:In this paper, a novel 2.5-dimensional (2.5D) flexible wind sensor is proposed based on four differential plate capacitors. This design consists of a windward pillar, two electrode layers, and a support layer, which are all made of polydimethylsiloxane (PDMS) with different Young’s moduli. A 2 mm × 2 mm copper electrode array is located on each electrode layer, forming four parallel plate capacitors as the sensitive elements. The wind in the xy-plane tilts the windward pillar, decreasing two capacitances on the windward side and increasing two capacitances on the leeward side. The wind in the <i>z</i>-axis depresses the windward pillar, resulting in an increase of all four capacitances. Experiments demonstrate that this sensor can measure the wind speed up to 23.9 m/s and the wind direction over the full 360° range of the xy-plane. The sensitivities of wind speed are close to 4 fF·m<sup>−1</sup>·s and 3 fF·m<sup>−1</sup>·s in the xy-plane and <i>z</i>-axis, respectively.
ISSN:1424-8220