MEMS resonators with electrostatic actuation and piezoresistive readout for sensing applications
MEMS resonators based on internal thermal-piezoresistive amplification are a suitable alternative for sensing applications since they enable high resonance frequencies and high Q-factors. In this work, the principle of operation of this amplification mechanism is modeled, using analytical and lumped...
| Main Authors: | , , , |
|---|---|
| 格式: | Article |
| 語言: | English |
| 出版: |
Elsevier
2022-08-01
|
| 叢編: | Micro and Nano Engineering |
| 主題: | |
| 在線閱讀: | http://www.sciencedirect.com/science/article/pii/S2590007222000557 |