Roles of Atomic Nitrogen/Hydrogen in GaN Film Growth by Chemically Assisted Sputtering with Dual Plasma Sources

Библиографические подробности
Главные авторы: Atsushi Tanide, Shohei Nakamura, Akira Horikoshi, Shigeru Takatsuji, Takahiro Kimura, Kazuo Kinose, Soichi Nadahara, Masazumi Nishikawa, Akinori Ebe, Kenji Ishikawa, Osamu Oda, Masaru Hori
Формат: Статья
Язык:English
Опубликовано: American Chemical Society 2020-10-01
Серии:ACS Omega
Online-ссылка:https://doi.org/10.1021/acsomega.0c03865