Thermal Analysis of Parylene Thin Films for Barrier Layer Applications

Thermal Analysis of Parylene Thin Films for Barrier Layer Applications

Biocompatible polymer films demonstrating excellent thermal stability are highly desirable for high-temperature (>250 °C) applications, especially in the bioelectronic encapsulation domain. Parylene, as an organic thin film, is a well-established polymer material exhibiting excellent barrier prop...

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Bibliographic Details
Main Authors: Sébastien Buchwalder, Aurelio Borzì, Juan J. Diaz Leon, Florian Bourgeois, Cléo Nicolier, Sylvain Nicolay, Antonia Neels, Olaf Zywitzki, Andreas Hogg, Jürgen Burger
Format: Article
Language:English
Published: MDPI AG 2022-09-01
Series:Polymers
Subjects:
parylene
vapor phase deposition
annealing
thermal stability
water vapor transmission rate (WVTR)
helium transmission rate (HTR)
Online Access:https://www.mdpi.com/2073-4360/14/17/3677

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https://www.mdpi.com/2073-4360/14/17/3677

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