Modeling a Fluid-Coupled Single Piezoelectric Micromachined Ultrasonic Transducer Using the Finite Difference Method

Modeling a Fluid-Coupled Single Piezoelectric Micromachined Ultrasonic Transducer Using the Finite Difference Method

A complete model was developed to simulate the behavior of a circular clamped axisymmetric fluid-coupled Piezoelectric Micromachined Ultrasonic Transducer (PMUT). Combining Finite Difference and Boundary Element Matrix (FD-BEM), this model is based on the discretization of the partial differential e...

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Bibliographic Details
Main Authors: Valentin Goepfert, Audren Boulmé, Franck Levassort, Tony Merrien, Rémi Rouffaud, Dominique Certon
Format: Article
Language:English
Published: MDPI AG 2023-11-01
Series:Micromachines
Subjects:
PMUT
ultrasound
MEMS
finite difference method
characterization
lumped-element
Online Access:https://www.mdpi.com/2072-666X/14/11/2089

Internet

https://www.mdpi.com/2072-666X/14/11/2089

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