Measurement Techniques for Three-Dimensional Metrology of High Aspect Ratio Internal Features—A Review
Non-destructive measurements of high aspect ratio microscale features, especially those with internal geometries such as micro-holes, remain a challenging metrology problem that is increasing in difficulty due to the increasing requirement for more complexity and higher tolerances in such structures...
Main Authors: | Tom Hovell, Jon Petzing, Wen Guo, Connor Gill, Laura Justham, Niels Lohse, Peter Kinnell |
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Format: | Article |
Language: | English |
Published: |
MDPI AG
2023-04-01
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Series: | Metrology |
Subjects: | |
Online Access: | https://www.mdpi.com/2673-8244/3/2/9 |
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