A Comparative Investigation of Mechanical Properties of TiB<sub>2</sub>/Cr Multilayer Film by Indentation

Alternating TiB<sub>2</sub>-dcMS and Cr-HiPIMS layers are used to fabricate TiB<sub>2</sub>/Cr multilayer films. Introducing a 5-nm-thick Cr interlayer deposited under a substrate bias of −60 V produces slight increases in both film hardness and elastic modulus. The TEM obser...

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書目詳細資料
Main Authors: Simeng Chen, Zhengtao Wu, Qimin Wang
格式: Article
語言:English
出版: MDPI AG 2022-11-01
叢編:Magnetochemistry
主題:
在線閱讀:https://www.mdpi.com/2312-7481/8/11/148

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