A Comparative Investigation of Mechanical Properties of TiB<sub>2</sub>/Cr Multilayer Film by Indentation

Alternating TiB<sub>2</sub>-dcMS and Cr-HiPIMS layers are used to fabricate TiB<sub>2</sub>/Cr multilayer films. Introducing a 5-nm-thick Cr interlayer deposited under a substrate bias of −60 V produces slight increases in both film hardness and elastic modulus. The TEM obser...

Celý popis

Podrobná bibliografie
Hlavní autoři: Simeng Chen, Zhengtao Wu, Qimin Wang
Médium: Článek
Jazyk:English
Vydáno: MDPI AG 2022-11-01
Edice:Magnetochemistry
Témata:
On-line přístup:https://www.mdpi.com/2312-7481/8/11/148