Charge storage and tunneling mechanism of Ni nanocrystals embedded HfOx film
A nano-floating gate memory structure based on Ni nanocrystals (NCs) embedded HfOx film is deposited by means of radio-frequency magnetron sputtering. Microstructure investigations reveal that self-organized Ni-NCs with diameters of 4-8 nm are well dispersed in amorphous HfOx matrix. Pt/Ni-NCs embed...
| Main Authors: | , , , , , |
|---|---|
| Formato: | Artigo |
| Idioma: | English |
| Publicado em: |
AIP Publishing LLC
2016-05-01
|
| Colecção: | AIP Advances |
| Acesso em linha: | http://dx.doi.org/10.1063/1.4948751 |