A thermal study of amorphous and textured carbon and carbon nitride thin films via transient grating spectroscopy

In this study, we are considering a novel way of growing carbon nitride (CN) films by using High Power Impulse Magnetron Sputtering (HiPIMS). Carbon and CN thin films were grown on silicon substrate with varying nanocrystalline texturing: some samples were amorphous while others were either nanocrys...

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Những tác giả chính: Cometto, Olivier, Dennett, Cody Andrew, Tsang, Siu Hon, Teo, Edwin H.T., Short, Michael P
Tác giả khác: Massachusetts Institute of Technology. Department of Nuclear Science and Engineering
Định dạng: Bài viết
Ngôn ngữ:en_US
Được phát hành: Elsevier BV 2020
Truy cập trực tuyến:https://hdl.handle.net/1721.1/123893
Miêu tả
Tóm tắt:In this study, we are considering a novel way of growing carbon nitride (CN) films by using High Power Impulse Magnetron Sputtering (HiPIMS). Carbon and CN thin films were grown on silicon substrate with varying nanocrystalline texturing: some samples were amorphous while others were either nanocrystalline graphite (for the carbon sample) or fullerene-like (for the CN sample), with both samples having a graphitic nanostructure vertically ordered throughout the film. Their thermal diffusivity was computed using transient grating spectroscopy in order to compare the impact of the material's nanostructure on its thermal property as well as benchmarking the performance of CN. It was found that the thermal properties of carbon thin films were decreased when doped with nitrogen, which is attributed to the increased atomic disorder introduced by the nitrogen cross-linking, impacting the phonon propagation. The impact of nitrogen doping on thermal properties opens new avenues in engineering materials with tailored and varying thermal properties at the microscale. Keywords: Carbon nitride; HiPIMS; Transient grating spectroscopy