Piezoelectric films using hybrid technology for ultrasonic array and electronic device applications
Lead zirconate titanate (PZT) films are promising for MEMS type micro-devices applications because of their high electromechanical coupling coefficients and excellent piezoelectric properties. PZT piezoelectric film integrated on silicon substrate for various MEMS devices has been the subject of con...
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| Format: | Thesis |
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2008
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| Online adgang: | https://hdl.handle.net/10356/3404 |