Deactivation and diffusion of boron in ion-implanted silicon studied by secondary electron imaging
Үндсэн зохиолчид: | Castell, M, Simpson, T, Mitchell, I, Perovic, D, Baribeau, J |
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Формат: | Journal article |
Хэвлэсэн: |
1999
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Ижил төстэй зүйлс
Ижил төстэй зүйлс
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Deactivation and diffusion of boron in ion-implanted silicon studied by secondary electron imaging
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