Structural characterisation of CNx thin films deposited by pulsed laser ablation
Carbon nitride (CNx) film growth by 193 nm pulsed laser ablation of graphite in a low pressure of N2 has been investigated both by studying optical emission from the plume and by analyses of the composition, structure and bonding of material deposited at a range of substrate temperatures. Spectral a...
| Main Authors: | , , , , |
|---|---|
| פורמט: | Journal article |
| שפה: | English |
| יצא לאור: |
2003
|