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Residual stress measurement in thin films at sub-micron scale using Focused Ion Beam milling and imaging

Residual stress measurement in thin films at sub-micron scale using Focused Ion Beam milling and imaging

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書目詳細資料
Main Authors: Song, X, Yeap, K, Zhu, J, Belnoue, J, Sebastiani, M, Bemporad, E, Zeng, K, Korsunsky, A
格式: Journal article
出版: 2012
  • 持有資料
  • 實物特徵
  • Other Versions (1)
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實物特徵
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  • Focused ion beam ring drilling for residual stress evaluation
    由: Korsunsky, A, et al.
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