Imaging modes for scanning confocal electron microscopy in a double aberration-corrected transmission electron microscope.
Aberration correction leads to reduced focal depth of field in the electron microscope. This reduced depth of field can be exploited to probe specific depths within a sample, a process known as optical sectioning. An electron microscope fitted with aberration correctors for both the pre- and postspe...
| Main Authors: | , , , |
|---|---|
| Format: | Conference item |
| Published: |
2008
|