The properties of nitrogen and oxygen in silicon

A novel dislocation locking technique is used to study the behaviour of nitrogen and oxygen in silicon. Specimens containing well-defined arrays of dislocation half-loops are subjected to isothermal anneals of controlled duration, during which nitrogen or oxygen diffuses to the dislocations. The str...

Ausführliche Beschreibung

Bibliographische Detailangaben
Hauptverfasser: Murphy, J, John Douglas Murphy
Weitere Verfasser: Wilshaw, P
Format: Abschlussarbeit
Sprache:English
Veröffentlicht: 2006
Schlagworte: