Studies of the chemistry of plasmas used for semiconductor etching

Studies of the chemistry of plasmas used for semiconductor etching

<p>Optical diagnostic techniques have been developed and then used to investigate the chemistry of reactive species formed in CF<sub>4</sub> / O<sub>2</sub> rf parallel plate discharges, similar to those employed in semiconductor material processing.</p> <p>...

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Dettagli Bibliografici
Autori principali:	Toogood, M, M. J. Toogood
Altri autori:	Hancock, G
Natura:	Tesi
Lingua:	English
Pubblicazione:	1991
Soggetti:	Semiconductors Etching Plasma etching

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