ATOM-PROBE FIELD-ION MICROSCOPE STUDIES OF PALLADIUM SILICIDE ON SILICON

ATOM-PROBE FIELD-ION MICROSCOPE STUDIES OF PALLADIUM SILICIDE ON SILICON

Palladium silicide coated silicon specimens have been formed by thermally evaporating palladium onto clean field evaporated n-type silicon (100) tips. The thin palladium overlayer is reacted to form palladium silicide by thermal annealing at 675 K. The tips were studied by field ion imaging, pulsed...

書目詳細資料
Main Authors:	King, R, Mackenzie, R, Smith, G, Cade, N
格式:	Conference item
出版:	1995

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