Micro electro mechanical systems (MEMS) : technology, fabrication processes, and applications /

Micro electro mechanical systems (MEMS) : technology, fabrication processes, and applications /

Includes bibliographical references and index

Dades bibliogràfiques
Autors principals: Ekwall, Britt, Cronquist, Mikkel
Format:
Idioma:eng
Publicat: Hauppauge, N.Y. : Nova Science Publishers, c201
Matèries:
Microelectromechanical systems
Descripció
Sumari:Includes bibliographical references and index

Ítems similars