Effect of negative bias voltage on preparation of diamond-like carbon films with high interfacial strength
In order to solve the problem of interfacial bonding strength and thick film between diamond-like carbon(DLC) film and metal substrate, a new process using a-Si: C: H bonding layer and H-DLC transition layer was proposed. The composite DLC films under different negative bias voltage conditions were...
| Main Authors: | , , , |
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| Formato: | Artigo |
| Idioma: | zho |
| Publicado: |
Journal of Materials Engineering
2023-10-01
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| Series: | Cailiao gongcheng |
| Subjects: | |
| Acceso en liña: | http://jme.biam.ac.cn/CN/10.11868/j.issn.1001-4381.2022.001081 |