System level simulation and fabrication of SOI-MEMS differential Capacitive accelerometer
This study primarily covers the design and development of an MEMS based accelerometer. Frequency, displacement sensitivity, and capacitance are the subject of analytical modelling; the corresponding values are found to be 7.41kHz, 4.5096∗10−9 m/g, and 0.289pF respectively. COMSOL Multiphysics is use...
| Main Authors: | , , , , |
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| 格式: | Article |
| 語言: | English |
| 出版: |
Tamkang University Press
2024-01-01
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| 叢編: | Journal of Applied Science and Engineering |
| 主題: | |
| 在線閱讀: | http://jase.tku.edu.tw/articles/jase-202403-27-3-0012 |