Nucleation and Growth of GaAs on a Carbon Release Layer by Halide Vapor Phase Epitaxy

Bibliographic Details
Main Authors: Dennice M. Roberts, Hyunseok Kim, Elisabeth L. McClure, Kuangye Lu, John S. Mangum, Anna K. Braun, Aaron J. Ptak, Kevin L. Schulte, Jeehwan Kim, John Simon
Format: Article
Language:English
Published: American Chemical Society 2023-11-01
Series:ACS Omega
Online Access:https://doi.org/10.1021/acsomega.3c07162