Multilayer block copolymer meshes by orthogonal self-assembly

Multilayer block copolymer meshes by orthogonal self-assembly

Continued scaling-down of lithographic-pattern feature sizes has brought templated self-assembly of block copolymers (BCPs) into the forefront of nanofabrication research. Technologies now exist that facilitate significant control over otherwise unorganized assembly of BCP microdomains to form both...

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Bibliographic Details
Main Authors: Alexander-Katz, Alfredo, Ross, Caroline A., Berggren, Karl K., Tavakkoli Kermani Ghariehali, Amir, Nicaise, Sam, Gadelrab, Karim Raafat
Other Authors: Massachusetts Institute of Technology. Department of Electrical Engineering and Computer Science
Format: Article
Language:en_US
Published: Nature Publishing Group 2016
Online Access:http://hdl.handle.net/1721.1/101867
https://orcid.org/0000-0003-2262-1249
https://orcid.org/0000-0002-9498-7808
https://orcid.org/0000-0003-3329-9099
https://orcid.org/0000-0002-6000-3364
https://orcid.org/0000-0001-7453-9031
https://orcid.org/0000-0001-5554-1283

Internet

http://hdl.handle.net/1721.1/101867
https://orcid.org/0000-0003-2262-1249
https://orcid.org/0000-0002-9498-7808
https://orcid.org/0000-0003-3329-9099
https://orcid.org/0000-0002-6000-3364
https://orcid.org/0000-0001-7453-9031
https://orcid.org/0000-0001-5554-1283

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