Microelectromechanical systems--materials and devices IV : symposium held November 29-December 3, [2010], Boston, Massachusetts, U.S.A. /

Includes bibliographical references and indexes.

Detalles Bibliográficos
Autores principales: Symposium S, "Microelectromechanical Systems--Materials and Devices IV" (2010 : Boston, Mass.), DelRio, Frank W., Materials Research Society
Formato:
Lenguaje:eng
Publicado: Warrendale, Pa. : Materials Research Society ; New York, NY : Cambridge University Press, 2011
Materias:
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author Symposium S, "Microelectromechanical Systems--Materials and Devices IV" (2010 : Boston, Mass.)
DelRio, Frank W.
Materials Research Society
author_facet Symposium S, "Microelectromechanical Systems--Materials and Devices IV" (2010 : Boston, Mass.)
DelRio, Frank W.
Materials Research Society
author_sort Symposium S, "Microelectromechanical Systems--Materials and Devices IV" (2010 : Boston, Mass.)
collection OCEAN
description Includes bibliographical references and indexes.
first_indexed 2024-03-05T12:36:25Z
format
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institution Universiti Teknologi Malaysia - OCEAN
language eng
last_indexed 2024-03-05T12:36:25Z
publishDate 2011
publisher Warrendale, Pa. : Materials Research Society ; New York, NY : Cambridge University Press,
record_format dspace
spelling KOHA-OAI-TEST:4821622020-12-19T17:17:47ZMicroelectromechanical systems--materials and devices IV : symposium held November 29-December 3, [2010], Boston, Massachusetts, U.S.A. / Symposium S, "Microelectromechanical Systems--Materials and Devices IV" (2010 : Boston, Mass.) DelRio, Frank W. Materials Research Society Warrendale, Pa. : Materials Research Society ; New York, NY : Cambridge University Press,2011.engIncludes bibliographical references and indexes.PSZJBLMicroelectromechanical systemsMicroelectromechanical systemsThin filmsNanostructured materialsSiliconURN:ISBN:9781605112763 (hbk.)URN:ISBN:1605112763
spellingShingle Microelectromechanical systems
Microelectromechanical systems
Thin films
Nanostructured materials
Silicon
Symposium S, "Microelectromechanical Systems--Materials and Devices IV" (2010 : Boston, Mass.)
DelRio, Frank W.
Materials Research Society
Microelectromechanical systems--materials and devices IV : symposium held November 29-December 3, [2010], Boston, Massachusetts, U.S.A. /
title Microelectromechanical systems--materials and devices IV : symposium held November 29-December 3, [2010], Boston, Massachusetts, U.S.A. /
title_full Microelectromechanical systems--materials and devices IV : symposium held November 29-December 3, [2010], Boston, Massachusetts, U.S.A. /
title_fullStr Microelectromechanical systems--materials and devices IV : symposium held November 29-December 3, [2010], Boston, Massachusetts, U.S.A. /
title_full_unstemmed Microelectromechanical systems--materials and devices IV : symposium held November 29-December 3, [2010], Boston, Massachusetts, U.S.A. /
title_short Microelectromechanical systems--materials and devices IV : symposium held November 29-December 3, [2010], Boston, Massachusetts, U.S.A. /
title_sort microelectromechanical systems materials and devices iv symposium held november 29 december 3 2010 boston massachusetts u s a
topic Microelectromechanical systems
Microelectromechanical systems
Thin films
Nanostructured materials
Silicon
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