Microelectromechanical systems--materials and devices IV : symposium held November 29-December 3, [2010], Boston, Massachusetts, U.S.A. /
Includes bibliographical references and indexes.
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| Iaith: | eng |
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Warrendale, Pa. : Materials Research Society ; New York, NY : Cambridge University Press,
2011
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| _version_ | 1826453306697842688 |
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| author | Symposium S, "Microelectromechanical Systems--Materials and Devices IV" (2010 : Boston, Mass.) DelRio, Frank W. Materials Research Society |
| author_facet | Symposium S, "Microelectromechanical Systems--Materials and Devices IV" (2010 : Boston, Mass.) DelRio, Frank W. Materials Research Society |
| author_sort | Symposium S, "Microelectromechanical Systems--Materials and Devices IV" (2010 : Boston, Mass.) |
| collection | OCEAN |
| description | Includes bibliographical references and indexes. |
| first_indexed | 2024-03-05T12:36:25Z |
| format | |
| id | KOHA-OAI-TEST:482162 |
| institution | Universiti Teknologi Malaysia - OCEAN |
| language | eng |
| last_indexed | 2024-03-05T12:36:25Z |
| publishDate | 2011 |
| publisher | Warrendale, Pa. : Materials Research Society ; New York, NY : Cambridge University Press, |
| record_format | dspace |
| spelling | KOHA-OAI-TEST:4821622020-12-19T17:17:47ZMicroelectromechanical systems--materials and devices IV : symposium held November 29-December 3, [2010], Boston, Massachusetts, U.S.A. / Symposium S, "Microelectromechanical Systems--Materials and Devices IV" (2010 : Boston, Mass.) DelRio, Frank W. Materials Research Society Warrendale, Pa. : Materials Research Society ; New York, NY : Cambridge University Press,2011.engIncludes bibliographical references and indexes.PSZJBLMicroelectromechanical systemsMicroelectromechanical systemsThin filmsNanostructured materialsSiliconURN:ISBN:9781605112763 (hbk.)URN:ISBN:1605112763 |
| spellingShingle | Microelectromechanical systems Microelectromechanical systems Thin films Nanostructured materials Silicon Symposium S, "Microelectromechanical Systems--Materials and Devices IV" (2010 : Boston, Mass.) DelRio, Frank W. Materials Research Society Microelectromechanical systems--materials and devices IV : symposium held November 29-December 3, [2010], Boston, Massachusetts, U.S.A. / |
| title | Microelectromechanical systems--materials and devices IV : symposium held November 29-December 3, [2010], Boston, Massachusetts, U.S.A. / |
| title_full | Microelectromechanical systems--materials and devices IV : symposium held November 29-December 3, [2010], Boston, Massachusetts, U.S.A. / |
| title_fullStr | Microelectromechanical systems--materials and devices IV : symposium held November 29-December 3, [2010], Boston, Massachusetts, U.S.A. / |
| title_full_unstemmed | Microelectromechanical systems--materials and devices IV : symposium held November 29-December 3, [2010], Boston, Massachusetts, U.S.A. / |
| title_short | Microelectromechanical systems--materials and devices IV : symposium held November 29-December 3, [2010], Boston, Massachusetts, U.S.A. / |
| title_sort | microelectromechanical systems materials and devices iv symposium held november 29 december 3 2010 boston massachusetts u s a |
| topic | Microelectromechanical systems Microelectromechanical systems Thin films Nanostructured materials Silicon |
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