Self-Calibration Technique with Lightweight Algorithm for Thermal Drift Compensation in MEMS Accelerometers

Self-Calibration Technique with Lightweight Algorithm for Thermal Drift Compensation in MEMS Accelerometers

Capacitive MEMS accelerometers have a high thermal sensitivity that drifts the output when subjected to changes in temperature. To improve their performance in applications with thermal variations, it is necessary to compensate for these effects. These drifts can be compensated using a lightweight a...

書目詳細資料
Main Authors:	Javier Martínez, David Asiain, José Ramón Beltrán
格式:	Article
語言:	English
出版:	MDPI AG 2022-04-01
叢編:	Micromachines
主題:	MEMS accelerometer thermal drift thermal compensation calibration technique
在線閱讀:	https://www.mdpi.com/2072-666X/13/4/584

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