Effects of oxygen plasma treatment on the formation of ohmic contacts to GaN and AlGaN
| Main Authors: | , , , , , |
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| Format: | Conference item |
| Published: |
2004
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| _version_ | 1826273367071653888 |
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| author | Yan, J Kappers, M Crossley, A McAleese, C Phillips, W Humphreys, C |
| author_facet | Yan, J Kappers, M Crossley, A McAleese, C Phillips, W Humphreys, C |
| author_sort | Yan, J |
| collection | OXFORD |
| description | |
| first_indexed | 2024-03-06T22:27:06Z |
| format | Conference item |
| id | oxford-uuid:570472b1-3bdc-46e3-b1d3-f6696b3a8c04 |
| institution | University of Oxford |
| last_indexed | 2024-03-06T22:27:06Z |
| publishDate | 2004 |
| record_format | dspace |
| spelling | oxford-uuid:570472b1-3bdc-46e3-b1d3-f6696b3a8c042022-03-26T16:54:01ZEffects of oxygen plasma treatment on the formation of ohmic contacts to GaN and AlGaNConference itemhttp://purl.org/coar/resource_type/c_5794uuid:570472b1-3bdc-46e3-b1d3-f6696b3a8c04Symplectic Elements at Oxford2004Yan, JKappers, MCrossley, AMcAleese, CPhillips, WHumphreys, C |
| spellingShingle | Yan, J Kappers, M Crossley, A McAleese, C Phillips, W Humphreys, C Effects of oxygen plasma treatment on the formation of ohmic contacts to GaN and AlGaN |
| title | Effects of oxygen plasma treatment on the formation of ohmic contacts to GaN and AlGaN |
| title_full | Effects of oxygen plasma treatment on the formation of ohmic contacts to GaN and AlGaN |
| title_fullStr | Effects of oxygen plasma treatment on the formation of ohmic contacts to GaN and AlGaN |
| title_full_unstemmed | Effects of oxygen plasma treatment on the formation of ohmic contacts to GaN and AlGaN |
| title_short | Effects of oxygen plasma treatment on the formation of ohmic contacts to GaN and AlGaN |
| title_sort | effects of oxygen plasma treatment on the formation of ohmic contacts to gan and algan |
| work_keys_str_mv | AT yanj effectsofoxygenplasmatreatmentontheformationofohmiccontactstoganandalgan AT kappersm effectsofoxygenplasmatreatmentontheformationofohmiccontactstoganandalgan AT crossleya effectsofoxygenplasmatreatmentontheformationofohmiccontactstoganandalgan AT mcaleesec effectsofoxygenplasmatreatmentontheformationofohmiccontactstoganandalgan AT phillipsw effectsofoxygenplasmatreatmentontheformationofohmiccontactstoganandalgan AT humphreysc effectsofoxygenplasmatreatmentontheformationofohmiccontactstoganandalgan |