MEMS Device for Quantitative In Situ Mechanical Testing in Electron Microscope
In this work, we designed a micro-electromechanical systems (MEMS) device that allows simultaneous direct measurement of mechanical properties during deformation under external stress and characterization of the evolution of nanomaterial microstructure within a transmission electron microscope. This...
Main Authors: | Xiaodong Wang, Shengcheng Mao, Jianfei Zhang, Zhipeng Li, Qingsong Deng, Jin Ning, Xudong Yang, Li Wang, Yuan Ji, Xiaochen Li, Yinong Liu, Ze Zhang, Xiaodong Han |
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Format: | Article |
Language: | English |
Published: |
MDPI AG
2017-01-01
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Series: | Micromachines |
Subjects: | |
Online Access: | http://www.mdpi.com/2072-666X/8/2/31 |
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