NEAR INFRARED PHOTOLUMINESCENCE OF THE HYDROGENATED AMORPHOUS SILICON THIN FILMS WITH IN-SITU EMBEDDED SILICON NANOPARTICLES

NEAR INFRARED PHOTOLUMINESCENCE OF THE HYDROGENATED AMORPHOUS SILICON THIN FILMS WITH IN-SITU EMBEDDED SILICON NANOPARTICLES

The intrinsic hydrogenated silicone layers with embedded silicon nanoparticles were grown in-situ at 250°C on glass substrates by the radio frequency plasma enhanced chemical vapor deposition (CVD) from silane highly diluted in hydrogen. The changes in the optical absorption coefficient were detecte...

Бүрэн тодорхойлолт

Номзүйн дэлгэрэнгүй
Үндсэн зохиолчид:	Z. Remes, J. Stuchlik, Purkrt A., Ledinsky M., Kupcik J.
Формат:	Өгүүллэг
Хэл сонгох:	English
Хэвлэсэн:	University of Chemistry and Technology, Prague 2017-03-01
Цуврал:	Ceramics-Silikáty
Нөхцлүүд:	Amorphous silicon Chemical vapor deposition Photothermal deflection spectroscopy
Онлайн хандалт:	http://www.ceramics-silikaty.cz/index.php?page=cs_detail_doi&id=876

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