Improvement of the pad wear shape in fixed abrasive chemical-mechanical polishing for manufacturing optical components
Fixed abrasive chemical mechanical polishing has some advantages in generating planarity surfaces of optical components. The surface after polishing has better uniformity, and the material removal rate is much more than the traditional chemical mechanical polishing. The pad wear shape has a signific...
Main Authors: | Nguyen, N. Y., Tian, Y. B., Zhong, Z. W. |
---|---|
Other Authors: | Asundi, Anand K. |
Format: | Conference Paper |
Language: | English |
Published: |
2018
|
Subjects: | |
Online Access: | https://hdl.handle.net/10356/88737 http://hdl.handle.net/10220/46966 |
Similar Items
-
An analytical investigation of pad wear caused by the conditioner in fixed abrasive chemical–mechanical polishing
by: Nguyen, N. Y., et al.
Published: (2016) -
Development of fixed abrasive chemical mechanical polishing process for glass disk substrates
by: Tian, Ye Bing, et al.
Published: (2016) -
Study on the Preparation and Performance of Self-Regressive Fixed Abrasive Chemical Mechanical Polishing Pad
by: Jianguo Yao, et al.
Published: (2022-10-01) -
Effects of chemical slurries on fixed abrasive chemical-mechanical polishing of optical silicon substrates
by: Tian, Yebing, et al.
Published: (2016) -
Advanced polishing, grinding and finishing processes for various manufacturing applications: a review
by: Zhong, Zhao Wei
Published: (2022)